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Analysis of plasma enhanced chemical vapour deposition-grown Borophosphosilicate glass with a combination of Rutherford backscattering and elastic recoil detection
J. B. Oude Elferink, K. Dunselman, E. J. Evers, F. H. P. M. Habraken, W. F. Van Der Weg, J. HolsbrinkVolume:
9
Année:
1986
Langue:
english
Pages:
4
DOI:
10.1002/sia.740090505
Fichier:
PDF, 310 KB
english, 1986