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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 22 February 2009)] Metrology, Inspection, and Process Control for Microlithography XXIII - Efficient use of design-based binning methodology in a DRAM fab
Karsenti, Laurent, Allgair, John A., Raymond, Christopher J., Wehner, Arno, Fischer, Andreas, Seifert, Uwe, Goeckeritz, Jens, Geshel, Mark, Gscheidlen, Dieter, Bartov, AvishaiVolume:
7272
Année:
2009
Langue:
english
DOI:
10.1117/12.814095
Fichier:
PDF, 952 KB
english, 2009