SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2003 - Maspalomas, Gran Canaria, Canary Islands, Spain (Monday 19 May 2003)] Nanotechnology - Large-scale integration of carbon nanotubes into silicon-based microelectronics
Duesberg, Georg S., Graham, Andrew P., Liebau, Maik, Seidel, Robert, Unger, Eugen, Kreupl, Franz, Hoenlein, Wolfgang, Vajtai, Robert, Aymerich, Xavier, Kish, Laszlo B., Rubio, AngelVolume:
5118
Année:
2003
Langue:
english
DOI:
10.1117/12.499414
Fichier:
PDF, 417 KB
english, 2003