SPIE Proceedings [SPIE Microelectronic Processing '93 - Monterey, CA (Sunday 26 September 1993)] Multilevel Interconnection: Issues That Impact Competitiveness - Properties of silicon oxide deposited by electron-cyclotron-resonance plasma-enhanced chemical vapor deposition
Fowler, Burt W., Stark, David R., Xie, J., McDonald, C., Carpio, Ronald A., Akbar, Sha, Hoang, Hoang H., Schutz, Ron, Bernstein, Joseph B., Vasquez, BarbaraVolume:
2090
Année:
1993
Langue:
english
DOI:
10.1117/12.156526
Fichier:
PDF, 359 KB
english, 1993