SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Design for Manufacturability through Design-Process Integration - Multidimensional physical design optimization for systematic and parametric yield loss reduction
Karklin, L. N., Wong, Alfred K. K., Singh, Vivek K., Arkhipov, A., Belenky, Y., Decoin, C., Lay, D., Manuylov, V., Zelnik, C., Watson, B. W., Willekens, J.Volume:
6521
Année:
2007
Langue:
english
DOI:
10.1117/12.711774
Fichier:
PDF, 759 KB
english, 2007