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SPIE Proceedings [SPIE Microlithography '99 - Santa Clara, CA (Sunday 14 March 1999)] Advances in Resist Technology and Processing XVI - Improved resolution with advanced negative DUV photoresist with 0.26N capability
Prokopowicz, Gregory P., Georger, Jr., Jacque H., Ayyash, Eyad, Thackeray, James W., Brunsvold, William R., Kosbar, Laura L., Afzali-Kushaa, Ali, Gelorme, Jeffrey D., Conley, WillVolume:
3678
Année:
1999
Langue:
english
DOI:
10.1117/12.350181
Fichier:
PDF, 3.66 MB
english, 1999