SPIE Proceedings [SPIE San Diego '92 - San Diego, CA (Sunday 19 July 1992)] Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography - Fabrication and performance of linear multilayer gratings in the 44-130 angstrom wavelength range
Boher, Pierre, Houdy, Philippe, Khan Malek, Chantal G., Ladan, F. R., Bac, S., Schirmann, Daniel, Troussel, Philippe, Krumrey, Michael K., Mueller, Peter, Scholze, Frank, Hoover, Richard B., Walker IIVolume:
1742
Année:
1993
Langue:
english
DOI:
10.1117/12.140580
Fichier:
PDF, 1.02 MB
english, 1993
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