
SPIE Proceedings [SPIE MOEMS-MEMS - San Francisco, California (Saturday 23 January 2010)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX - Stability experiments on MEMS aluminum nitride RF resonators
Tanner, Danelle M., Kullberg, Richard C., Ramesham, Rajeshuni, Olsson III, Roy H., Parson, Ted B., Crouch, Shannon M., Walraven, Jeremy A., Ohlhausen, James A.Volume:
7592
Année:
2010
Langue:
english
DOI:
10.1117/12.846551
Fichier:
PDF, 2.79 MB
english, 2010