SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, Ca (Sunday 25 January 2004)] Photon Processing in Microelectronics and Photonics III - Analysis of debris generated during UV laser micromachining of silicon
Herman, Peter R., O'Connor, Gerard M., Howard, Helen, Fieret, Jim, Pique, Alberto, Conneely, Alan J., Glynn, Thomas J., Okada, Tatsuo, Bachmann, Friedrich G., Hoving, Willem, Washio, Kunihiko, Xu, XiaVolume:
5339
Année:
2004
Langue:
english
DOI:
10.1117/12.529248
Fichier:
PDF, 837 KB
english, 2004