SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Imaging Technology and Telescopes - Design and fabrication of electrostatic actuators with corrugated membranes for MEMS deformable mirror in space
Yang, Eui-Hyeok, Wiberg, Dean V., Dekany, Richard G., Bilbro, James W., Breckinridge, James B., Carreras, Richard A., Czyzak, Stanley R., Eckart, Mark J., Fiete, Robert D., Idell, Paul S.Volume:
4091
Année:
2000
Langue:
english
DOI:
10.1117/12.405766
Fichier:
PDF, 1.51 MB
english, 2000
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