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SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Tuesday 18 October 1994)] Microelectronics Manufacturability, Yield, and Reliability - Effects of resist strip processing damage on the electrical characteristics of 0.8-um a-Si antifuse circuit elements
Fujishiro, Felix, Vines, Landon B., Ravindhran, K. S., Han, Yu-Pin, Echtle, Danny, Garcia, Annette, Richardson, Brian, Weling, Milind, Hickey, James, Loh, Ying-Tsong, Vasquez, Barbara, Kawasaki, HisaoVolume:
2334
Année:
1994
Langue:
english
DOI:
10.1117/12.186738
Fichier:
PDF, 558 KB
english, 1994