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SPIE Proceedings [SPIE Microlithography '99 - Santa Clara, CA (Sunday 14 March 1999)] Advances in Resist Technology and Processing XVI - Design of acid labile protecting groups in chemically amplified resists
Fujita, Jun, Sasaki, Koshi, Kameyama, Yasuhiro, Chika, Yuzuru, Kashiwagi, Takeshi, Niinomi, Takaaki, Tanaka, Yuki, Tarutani, Shinji, Ochiai, Tameichi, Conley, WillVolume:
3678
Année:
1999
Langue:
english
DOI:
10.1117/12.350245
Fichier:
PDF, 1.58 MB
english, 1999