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SPIE Proceedings [SPIE Optics East 2005 - Boston, MA (Sunday 23 October 2005)] Nanofabrication: Technologies, Devices, and Applications II - ALD as enabling technology for the next generation of microprocessors
Lavoie, Adrien R., Lai, Warren Y., Ocola, Leonidas E., Dubin, Val, Pau, StanleyVolume:
6002
Année:
2005
Langue:
english
DOI:
10.1117/12.634884
Fichier:
PDF, 228 KB
english, 2005