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SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Modeling Aspects in Optical Metrology IV - Modelling PTB's spatial angle autocollimator calibrator
Kranz, Oliver, Geckeler, Ralf D., Just, Andreas, Krause, Michael, Bodermann, Bernd, Frenner, Karsten, Silver, Richard M.Volume:
8789
Année:
2013
Langue:
english
DOI:
10.1117/12.2020279
Fichier:
PDF, 437 KB
english, 2013