SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 3 April 2006)] Optical Micro- and Nanometrology in Microsystems Technology - Continuous writing technique of long gratings for metrological applications
Gamet, Emilie, Gorecki, Christophe, Asundi, Anand K., Jourlin, Yves, Reynaud, Stéphanie, Osten, Wolfgang, Pommier, Jean-Claude, Parriaux, OlivierVolume:
6188
Année:
2006
Langue:
english
DOI:
10.1117/12.662207
Fichier:
PDF, 327 KB
english, 2006