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SPIE Proceedings [SPIE Electron Technology Conference 2013 - Ryn, Poland (Tuesday 16 April 2013)] Electron Technology Conference 2013 - On-wafer measurements and characterization of poly-si resistors for evaluation of selected CMOS manufacturing processes
Głuszko, Grzegorz, Tomaszewski, Daniel, Malesińska, Jolanta, Kucharski, Krzysztof, Szczepanski, Pawel, Kisiel, Ryszard, Romaniuk, Ryszard S.Volume:
8902
Année:
2013
Langue:
english
DOI:
10.1117/12.2031057
Fichier:
PDF, 839 KB
english, 2013