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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Advances in Resist Materials and Processing Technology XXX - Investigation of trench and contact hole shrink mechanism in the negative tone develop process
Mehta, Sohan Singh, Higgins, Craig, Chauhan, Vikrant, Pal, Shyam, Koh, Hui Peng, Fakhoury, Jean Raymond, Gao, Shaowen, Subramany, Lokesh, Iqbal, Salman, Jeon, Bumhwan, Morrison, Pedro, Karanikas, ChriVolume:
8682
Année:
2013
Langue:
english
DOI:
10.1117/12.2012331
Fichier:
PDF, 562 KB
english, 2013