SPIE Proceedings [SPIE SPIE Lithography Asia - Taipei, Taiwan (Wednesday 18 November 2009)] Lithography Asia 2009 - Comparison of rule-based versus model-based decomposition technique
LaCour, Pat, Chen, Alek C., Han, Woo-Sung, Dave, Aasutosh, Chou, Dyiann, Lin, Burn J., Yen, Anthony, El Sewefy, OmarVolume:
7520
Année:
2009
Langue:
english
DOI:
10.1117/12.837204
Fichier:
PDF, 206 KB
english, 2009