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SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Advances in Resist Materials and Processing Technology XXIV - Enhancing photoresist performance with an adhesion promoting photo-acid generator
Sharma, Shalini, Lin, Qinghuang, Meagley, Robert P.Volume:
6519
Année:
2007
Langue:
english
DOI:
10.1117/12.712359
Fichier:
PDF, 1.61 MB
english, 2007