SPIE Proceedings [SPIE Design, Process Integration, and Characterization for Microelectronics - Santa Clara, CA (Wednesday 6 March 2002)] Design, Process Integration, and Characterization for Microelectronics - Model-based OPC for sub-resolution assist feature enhanced layouts
LaCour, Pat, Pell, Edwin A., Granik, Yuri, Do, Thuy, Starikov, Alexander, Tobin, Jr., Kenneth W.Volume:
4692
Année:
2002
Langue:
english
DOI:
10.1117/12.475689
Fichier:
PDF, 79 KB
english, 2002