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SPIE Proceedings [SPIE Microlithography 2000 - Santa Clara, CA (Sunday 27 February 2000)] Optical Microlithography XIII - Extension of KrF lithography to sub-50-nm pattern formation
Nakao, Shuji, Itoh, Jiroh, Nakae, Akihiro, Kanai, Itaru, Saitoh, Takayiki, Matsubara, Hirosi, Tsujita, Kouichirou, Arimoto, Ichiriou, Wakamiya, Wataru, Progler, Christopher J.Volume:
4000
Année:
2000
Langue:
english
DOI:
10.1117/12.389025
Fichier:
PDF, 1.98 MB
english, 2000