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SPIE Proceedings [SPIE Optoelectronics '99 - Integrated Optoelectronic Devices - San Jose, CA (Saturday 23 January 1999)] Diffractive and Holographic Technologies, Systems, and Spatial Light Modulators VI - Adapting existing e-beam writers to write HEBS-glass gray-scale masks
Kley, Ernst-Bernhard, Cumme, Matthias, Wittig, Lars-Christian, Wu, Chuck, Cindrich, Ivan, Lee, Sing H., Sutherland, Richard L.Volume:
3633
Année:
1999
Langue:
english
DOI:
10.1117/12.349333
Fichier:
PDF, 1.14 MB
english, 1999