
SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing III - Verifying and preventing recurrence in metal defects for VLSI manufacturing
Lin, Hsun-Peng, Lee, Chih-Hsiung, Lo, Yi-Chuan, Liao, Chi-Horng, Lu, Kuo-Liang, Ghanbari, Abe, Toprac, Anthony J.Volume:
3213
Année:
1997
Langue:
english
DOI:
10.1117/12.284649
Fichier:
PDF, 1.35 MB
english, 1997