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[IEEE 2015 China Semiconductor Technology International Conference (CSTIC) - Shanghai, China (2015.3.15-2015.3.16)] 2015 China Semiconductor Technology International Conference - 40Nm contact related process optimization for defect reduction
Zhibin He,, Xubin Jing,, Jian Cao,, Yuming Qiu,, Junhua Yan,, Jun Zhou,, Albert Pang,Année:
2015
Langue:
english
DOI:
10.1109/cstic.2015.7153320
Fichier:
PDF, 502 KB
english, 2015