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SPIE Proceedings [SPIE Optics East - Philadelphia, PA (Monday 25 October 2004)] Nanofabrication: Technologies, Devices, and Applications - New low-cost MEMS capacitive pressure sensor concept
Wang, Yun, Cheung, Kin P., Sheng, Kuang, Pai, Chien-Shing, Lai, Warren Y., Pau, Stanley, Lopez, O. DanielVolume:
5592
Année:
2005
Langue:
english
DOI:
10.1117/12.571959
Fichier:
PDF, 497 KB
english, 2005