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SPIE Proceedings [SPIE 26th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 25 February 2001)] Metrology, Inspection, and Process Control for Microlithography XV - Wafer scale error induced by bottom antireflective coating
Kim, Dong-Seok, Jeong, JongHo, Nam, Byung-Ho, Hwang, Young J., Song, Young Jin, Sullivan, Neal T.Volume:
4344
Année:
2001
Langue:
english
DOI:
10.1117/12.436784
Fichier:
PDF, 111 KB
english, 2001