SPIE Proceedings [SPIE Microlithography '99 - Santa Clara, CA (Sunday 14 March 1999)] Emerging Lithographic Technologies III - X-ray mask fabrication at CXrL
Leonard, Quinn J., Bansel, Jaz, Yang, Lei, Vladimirsky, Olga, Bollepalli, Srinivas B., Khan, Mumit, Vladimirsky, Yuli, Cerrina, Franco, Taylor, James W., Simon, Klaus, Rathbun, Lynn C., Tiberio, RichaVolume:
3676
Année:
1999
Langue:
english
DOI:
10.1117/12.351147
Fichier:
PDF, 2.91 MB
english, 1999
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