
[IEEE 2015 IEEE 17th Electronics Packaging and Technology Conference (EPTC) - Singapore (2015.12.2-2015.12.4)] 2015 IEEE 17th Electronics Packaging and Technology Conference (EPTC) - CMP process optimization on temporary-bonded wafer for via-last through-silicon-via from backside
Ren, Qin, Loh, Woon Leng, Chui, K., Mao, Ying Jun, Wickramanayanaka, SunilAnnée:
2015
Langue:
english
DOI:
10.1109/eptc.2015.7412401
Fichier:
PDF, 1.34 MB
english, 2015