Optical properties of amorphous hydrogenated and microcrystalline silicon films prepared by plasma enhanced chemical vapor deposition and re-crystallized at moderate temperatures
Marie Netrvalova, Lucie Prusakova, Jarmila Mullerova, Pavol SuttaVolume:
8
Année:
2011
Langue:
english
Pages:
4
DOI:
10.1002/pssc.201084094
Fichier:
PDF, 270 KB
english, 2011