
Columnar structured amorphous carbon nitride films
Masami Aono, Shunsuke Kikuchi, Naoyuki Tamura, Nobuaki Kitazawa, Yoshihisa Watanabe, Shoji NittaVolume:
7
Année:
2010
Langue:
english
Pages:
1
DOI:
10.1002/pssc.200982676
Fichier:
PDF, 148 KB
english, 2010