The stress and microstructure of a-C multilayers deposited using a filtered cathodic vacuum arc and periodic substrate bias
Xiaoling Xiao, Jim Partridge, Matthew Taylor, Dougal McCullochVolume:
6
Année:
2009
Langue:
english
Pages:
5
DOI:
10.1002/pssc.200881704
Fichier:
PDF, 568 KB
english, 2009