Effects of two-step rapid thermal processing in different ambients on denuded zone and oxygen precipitation in Czochralski silicon
Liming Fu, Deren Yang, Xiangyang Ma, Can Cui, an. Duanlin QueVolume:
4
Année:
2007
Langue:
english
Pages:
6
DOI:
10.1002/pssc.200675466
Fichier:
PDF, 380 KB
english, 2007