Annealing of evaporated and sputtered niobium films in oxygen and nitrogen rich atmospheres by Rapid Thermal Processing (RTP)
Volha A. Matylitskaya, Oliver Brunkahl, Gerald Kothleitner, Wolfgang Bock, Bernd O. KolbesenVolume:
4
Année:
2007
Langue:
english
Pages:
15
DOI:
10.1002/pssc.200675231
Fichier:
PDF, 1.03 MB
english, 2007