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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 27 February 2011)] Optical Microlithography XXIV - Innovative self-aligned triple patterning for 1x half pitch using single "spacer deposition-spacer etch" step
Mebarki, Bencherki, Chen, Hao D., Chen, Yongmei, Wang, Aunchan, Liang, Jingmei, Sapre, Kedar, Mandrekar, Tushar, Chen, Xiaolin, Xu, Ping, Blanko, Pokhui, Ngai, Christopher, Bencher, Chris, Naik, MehulVolume:
7973
Année:
2011
Langue:
english
DOI:
10.1117/12.881574
Fichier:
PDF, 603 KB
english, 2011