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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Advances in Resist Materials and Processing Technology XXVII - Photoresist-induced development behavior in DBARCs
Meador, Jim D., Allen, Robert D., Guerrero, Alice, Lowes, Joyce A., Stroud, Charlyn, Carr, Brandy, Qin, Anwei, Washburn, Carlton, Mercado, Ramil-Marcelo L.Volume:
7639
Année:
2010
Langue:
english
DOI:
10.1117/12.846927
Fichier:
PDF, 1.50 MB
english, 2010