SPIE Proceedings [SPIE Photonics Asia 2004 - Beijing, China (Monday 8 November 2004)] MEMS/MOEMS Technologies and Applications II - Lumped model for the comb-finger capacitance and electrostatic force
Chen, Xuyuan, Ma, Zhichun, Jensen, Geir U., Ma, Zhichun, Jin, Guofan, Chen, XuyuanVolume:
5641
Année:
2004
Langue:
english
DOI:
10.1117/12.577315
Fichier:
PDF, 97 KB
english, 2004