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SPIE Proceedings [SPIE Photomask and Next Generation Lithography Mask Technology X - Yokohama, Japan (Wednesday 16 April 2003)] Photomask and Next-Generation Lithography Mask Technology X - Investigation of e-beam sensitive negative-tone chemically amplified resists for binary mask making
Irmscher, Mathias, Tanabe, Hiroyoshi, Berger, Lothar, Beyer, Dirk, Butschke, Joerg, Dress, Peter, Hoffmann, Thomas, Hudek, Peter, Koepernik, Corinna, Tschinkl, Martin, Voehringer, PeterVolume:
5130
Année:
2003
Langue:
english
DOI:
10.1117/12.504185
Fichier:
PDF, 2.29 MB
english, 2003