
SPIE Proceedings [SPIE SPIE's 1996 International Symposium on Microlithography - Santa Clara, CA (Sunday 10 March 1996)] Metrology, Inspection, and Process Control for Microlithography X - Resist metrology for lithography simulation, part I: exposure parameter measurements
Mack, Chris A., Matsuzawa, Toshiharu, Sekiguchi, Atsushi, Minami, Youichi, Jones, Susan K.Volume:
2725
Année:
1996
Langue:
english
DOI:
10.1117/12.240109
Fichier:
PDF, 339 KB
english, 1996