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SPIE Proceedings [SPIE Photomask Japan 2016 - Yokohama, Japan (Wednesday 6 April 2016)] Photomask Japan 2016: XXIII Symposium on Photomask and Next-Generation Lithography Mask Technology - Resist behaviour during peeling release in nano-imprint lithography
Yoshioka, Nobuyuki, Chalvin, Florian, Nakamura, Naoto, Tochino, Takamitsu, Yasuda, Masaaki, Kawata, Hiroaki, Hirai, YoshihikoVolume:
9984
Année:
2016
Langue:
english
DOI:
10.1117/12.2240298
Fichier:
PDF, 1.71 MB
english, 2016