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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 21 February 2016)] Extreme Ultraviolet (EUV) Lithography VII - Dynamic absorption coefficients of CAR and non-CAR resists at EUV
Panning, Eric M., Goldberg, Kenneth A., Fallica, Roberto, Stowers, Jason K., Grenville, Andrew, Frommhold, Andreas, Robinson, Alex P. G., Ekinci, YasinVolume:
9776
Année:
2016
Langue:
english
DOI:
10.1117/12.2219193
Fichier:
PDF, 745 KB
english, 2016