Optimized lithography and etching processes for a magnetic oxide micro-device
R. Soulimane, M. Koubaa, A. M. Haghiri-Gosnet, B. Mercey, W. Prellier, Ph. Lecoeur, G. Poullain, R. BouregbaVolume:
1
Année:
2004
Langue:
english
Pages:
4
DOI:
10.1002/pssc.200304426
Fichier:
PDF, 330 KB
english, 2004