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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 22 February 2009)] Advances in Resist Materials and Processing Technology XXVI - Incorporating organosilanes into EUV photoresists: diphenyltrimethylsilylmethylsulfonium triflate as a new PAG
Sharma, Shalini, Henderson, Clifford L., Ogata, Yoichi, Tung, Clarion, Blackwell, James M., Younkin, Todd R., Hishiro, Yoshi, Figueroa, Joshua S., Rheingold, Arnold L.Volume:
7273
Année:
2009
Langue:
english
DOI:
10.1117/12.814220
Fichier:
PDF, 1.83 MB
english, 2009