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SPIE Proceedings [SPIE Microlithography 2003 - Santa Clara, CA (Sunday 23 February 2003)] Advances in Resist Technology and Processing XX - Advanced RELACS (resolution enhancment of lithography by assist of chemical shrink) material for 193-nm lithography
Hong, Sungeun, Takano, Yusuke, Kanda, Takashi, Kudo, Takanori, Padmanaban, Munirathna, Tanaka, Hatsuyuki, Lee, Si-Hyeung, Lee, Jung-Hyeon, Woo, Sang-Gyun, Fedynyshyn, Theodore H.Volume:
5039
Année:
2003
Langue:
english
DOI:
10.1117/12.485155
Fichier:
PDF, 871 KB
english, 2003