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SPIE Proceedings [SPIE Optoelectronics '99 - Integrated Optoelectronic Devices - San Jose, CA (Saturday 23 January 1999)] Laser Applications in Microelectronic and Optoelectronic Manufacturing IV - Transient temperature measurement of amorphous silicon thin films during excimer laser annealing
Moon, Seung-Jae, Lee, Ming-Hong, Hatano, Mutsuko, Suzuki, Kenkichi, Grigoropoulos, Constantine P., Dubowski, Jan J., Helvajian, Henry, Kreutz, Ernst-Wolfgang, Sugioka, KojiVolume:
3618
Année:
1999
Langue:
english
DOI:
10.1117/12.352692
Fichier:
PDF, 455 KB
english, 1999