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SPIE Proceedings [SPIE Symposium on Photomask and X-Ray Mask Technology - Kawasaki City, Japan (Thursday 18 April 1996)] Photomask and X-Ray Mask Technology III - Development of advanced process for halftone phase-shift mask fabrication with electron-beam exposure systems
Komada, Minoru, Kurihara, Masa-aki, Sasaki, Shiho, Makabe, Takamitsu, Hayashi, Naoya, Yoshihara, HideoVolume:
2793
Année:
1996
Langue:
english
DOI:
10.1117/12.245245
Fichier:
PDF, 565 KB
english, 1996