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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Extreme Ultraviolet (EUV) Lithography - Wavelength dependence of carbon contamination on mirrors with different capping layers
La Fontaine, Bruno M., Thomas, Petros, Yankulin, Leonid, Khopkar, Yashdeep, Garg, Rashi, Mbanaso, Chimaobi, Antohe, Alin, Fan, Yu-Jen, Denbeaux, Gregory, Aouadi, Samir, Jindal, Vibhu, Wüest, AndreaVolume:
7636
Année:
2010
Langue:
english
DOI:
10.1117/12.847015
Fichier:
PDF, 2.08 MB
english, 2010