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SPIE Proceedings [SPIE SPIE 31st International Symposium on Advanced Lithography - San Jose, CA (Sunday 19 February 2006)] Optical Microlithography XIX - Analysis of the combined impact of the laser spectrum, illuminator miscalibrations, and lens aberrations on the 90nm technology node imaging with off-axis illuminations
Loi, Sara, Flagello, Donis G., Iessi, Umberto, Chung, RobertVolume:
6154
Année:
2006
Langue:
english
DOI:
10.1117/12.655567
Fichier:
PDF, 465 KB
english, 2006