SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Multilayer Optics for Advanced X-Ray Applications - Structural characteristics and performances of rf-sputtered Mo/Si and Co/Si multilayers for soft x-ray optics
Boher, Pierre, Houdy, Philippe, Hennet, Louis, Kuehne, Mikhael, Mueller, Peter, Frontier, J. P., Trouslard, P., Senillou, C., Joud, J. C., Ruterana, P., Ceglio, Natale M.Volume:
1547
Année:
1992
Langue:
english
DOI:
10.1117/12.51267
Fichier:
PDF, 1.79 MB
english, 1992
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