SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 29 July 2001)] Soft X-Ray and EUV Imaging Systems II - Bufferlayer and caplayer engineering of Mo/Si EUVL multilayer mirrors
Kleineberg, Ulf, Westerwalbesloh, Thomas, Wehmeyer, O., Sundermann, Michael, Brechling, Armin, Heinzmann, Ulrich, Haidl, Markus, Muellender, Stefan, Tichenor, Daniel A., Folta, James A.Volume:
4506
Année:
2001
Langue:
english
DOI:
10.1117/12.450951
Fichier:
PDF, 975 KB
english, 2001
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