SPIE Proceedings [SPIE International Symposium on Optoelectonics and Microelectronics - Nanjing, China (Wednesday 7 November 2001)] Micromachining and Microfabrication Process Technology and Devices - Analysis of a novel MEMS electrostatic comb actuator for optical switching
Yu, Pei-dong, Wang, Guozhong, Chen, Minghua, Xie, Shizhong, Tien, Norman C., Huang, Qing-AnVolume:
4601
Année:
2001
Langue:
english
DOI:
10.1117/12.444744
Fichier:
PDF, 139 KB
english, 2001